DMF Instrumentation
- Hitachi SU3500 scanning electron microscope with:
- high vacuum and variable pressure modes (6 to 650 Pa)
- 3.0 nm resolution
- accelerating voltage from 0.3 to 30 kV
- magnification from x5 to x300,000
- secondary electron detectors for both high-vacuum and variable pressure
- 5-segment solid-state backscatter electron detector with 3-D, compositional and topographic modes
- live stereoscopic (3-D) imaging
- 5-axis (4 motorized) eucentric goniometer stags for specimens up to 20 cm in diameter
- digital image acquisition (up to 5120 x 3840 pixels) and storage in a variety of standard formats
- direct-to-disk real time video capture
- infra-red chamber scope
- a full range of image processing software
- Oxford AZtec Energy EDS system with:
- X-Max 20 large area analytical Silicon Drift Detector (SDD; 127 eV resolution) for detection of Boron and all heavier elements
- Autocolumn for control of SEM functions from AZtec console
- software for qualitative, semi-quantitative and quantitative analyses
- point and ID, linscan and mapping modes
- Support equipment including:
|
